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A range of very high resolution reference calibration standards for AFM, SEM, Auger & FIB.

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10 products available

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  1. Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um...
    This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.
    Average lead time: 14 days

    POA

    Average lead time: 14 days
  2. Critical dimension (CD) calibration test specimens - 500-200-100 nm...
    This advanced CD calibration test specimen is suitable for calibrating smaller structures.
    Average lead time: 14 days

    POA

    Average lead time: 14 days
  3. 292nm reference standard
    292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB.
    Average lead time: 14 to 45 days

    POA

    Average lead time: 14 to 45 days
  4. SEM 144nm reference standard
    These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.
    Average lead time: 14 to 45 days

    POA

    Average lead time: 14 to 45 days
  5. SEM 144nm reference standard, certified
    These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.
    Average lead time: 14 to 45 days

    POA

    Average lead time: 14 to 45 days
  6. SEM 300nm reference standard
    These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.
    Average lead time: 14 to 45 days

    POA

    Average lead time: 14 to 45 days
  7. MetroChip calibration standard AGS1949
    The MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.
    Average lead time: 14 days

    POA

    Average lead time: 14 days
  8. Silicon nitride ion sputter standard AGS1805
    100nm silicon nitride (CVD) films deposited on a piece of silicon wafer, 1 x 3cm.
    Average lead time: 14 days

    POA

    Average lead time: 14 days
  9. Tantalum pentoxide ion sputter standard AGS1806
    Films of tantalum pentoxide (approximately 100nm) are anodically grown on 0.5mm thick tantalum foil.
    Average lead time: 14 days

    POA

    Average lead time: 14 days
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COVID-19: Please note that while we are working closely with our suppliers to minimise the effect of the COVID-19 pandemic, prices and availability may be subject to change at short notice.
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