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SEM 144nm Reference Standard

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

All prices exclude VAT.
Name & Code
Grouped product items
Code & DescriptionAvailabilityPriceQty
AGS1861
144nm Calibration Standard on Pin Stub 12.5 mm dia., 3.2 x 8 mm pin
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POA
POA
AGS1861A
144nm Calibration Standard on JEOL Stub 10 mm dia., 10 mm height
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POA
POA
AGS1861B
144nm Calibration Standard on ISI Stub 15 mm dia., 10 mm height
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POA
POA
AGS1861C
144nm Calibration Standard on Hitachi Stub 15 mm dia., 10 mm height
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POA
POA
AGS1861D
144nm Calibration Standard on Customer Specified Stub*
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POA
POA
AGS1861E
144nm Calibration Standard on JEOL stub 12.5 mm dia., 10 mm height
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POA
POA
AGS1861U
144nm Calibration Standard Unmounted
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POA
POA
Product Description

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

There are two pitch sizes available:
The 144nm pitch, two dimensional array is accurate to ±1 nm and is suitable for SEM and AFM calibrations. The pattern covers the entire chip enabling thousands of measurements to be made without revisiting the same scan area. The surface comprises aluminium ‘bumps’ on silicon. The bump height is approximately 90nm and width 75nm (not calibrated).

For SEM the 144nm standard works well at all accelerating voltages.

For AFM it can be used in contact, intermittent contact (TappingMode™) and other modes, with image sizes from 250nm to 10mm. For AFM the 2-D standard is available unmounted or can be mounted on 12mm steel discs. The pattern is durable and allows for extended scanning in contact mode, which means that calibration and measurements are faster.

The 144nm reference specimen comes with a non-traceable manufacturer’s certificate. This gives the average period based on batch measurements.

It can also be supplied as a traceable certified standard - AGS1862. Each standard is individually measured in comparison with a similar specimen calibrated at the German PTB (Physikalisch-Technische Bundesanstalt). The uncertainty of a single pitch is typically ±1.4nm.

* When requesting a quote for AGS1861D, please specify the stub you would like from our catalogue, or provide information on the stub you would like to send to us for mounting.

Technical DataDelivery & Returns
PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.