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Spare Targets

A range of spare targets is available for most well known makes of sputter coaters. In most instances, foil or disc targets are employed, with some older instruments using solid plated targets.

Disc targets are plain discs. Foil and annular targets are supplied mounted on aluminium backing plates.

The table below shows some of the commonly used target materials.

Coater
type

Target typeAuAu/PdPtPt/PdPdNiAgCr
 Disc targets        
157mm dia x 0.1mmAGB7390AGB7391AGB7392AGB7395AGB7397AGB7393AGB7394 
157mm dia x 0.2mmAGB7390-2AGB7391-2AGB7392-2AGB7395-2   
257mm dia x 3.2mm       AGB7396
354mm dia x 0.1mmAGB7199       
354mm dia x 0.2mmAGB7199-2AGB7164AGB7165AGB7166 AGB7167AGB7168 
          
 Foil targets on aluminium backing plates        
458mm (nominal) dia x 0.1mmAGB7190AGB7191AGB7192 AGB7150AGB7193AGB7194 
560mm dia x 0.1mmAGB7184AGB7185AGB7186AGB7169AGB7159AGB7187AGB7188 
640mm dia x 0.1mmAGB7195AGB7196      
720mm dia x 0.1mmAGB7197AGB7198      
840mm dia x 0.1mm Set of 4AGB7885AGB7888AGB7886  AGB7887AGB7889 
          
 Annular targets supplied on aluminium ring holders        
9OD: 82mm ID: 60mm x 0.1mm AGB7370AGB7371AGB7372 AGB7398AGB7373AGB7374 
10OD: 115mm ID: 92mm x 0.1mm AGB7876AGB7881AGB7882  AGB7883AGB7884 
          
 Other targets        
 Edwards S150A plated AGB7355A       
 Edwards S150B 73mm disc
Scancoat 6
AGB7351 AGB7356 AGB7357     
Other metals are available in certain sizes, please ask for details.       
Coater type         
1

Agar coaters
Cressington coaters (not 308 series) Polaron/Quorum/Bio-Rad/VG - E5000, E5200, E5400, SC502, SC7610, SC7620

2Agar turbo coater
Cressington turbo coater
3Bal-Tec/Leica SCD005, SCD050, MED010,MED020        
4Polaron/Quorum/Bio-Rad/VG/Emitech - SC500,SC500A        
5Polaron/Quorum/Bio-Rad/VG/Emitech - K500X, K550X        
6Polaron/Quorum/Bio-Rad/VG/Emscope - SM300, SC400        
7Polaron/Quorum/Bio-Rad/VG/Emscope - K1250X, SP2000        
8Polaron/Quorum/Bio-Rad/VG/Emitech - SC650, SC650A        
9Polaron/Quorum/Bio-Rad/VG/Emitech - SC510, SC515, E5100, SC7640, SC7680      
10Polaron/Quorum/Bio-Rad/VG/Emitech - E5175        

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