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Critical dimension (CD) calibration test specimens - 500-200-100 nm structure

This advanced CD calibration test specimen is suitable for calibrating smaller structures.
All prices exclude VAT.
Name & Code
Grouped product items
Code & DescriptionAvailabilityPriceQty
AGS1998
CD Calibration Specimen 500-200-100nm non certified
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POA
POA
Product Description

This advanced CD calibration test specimen is suitable for calibrating smaller structures. It comprises three line patterns, each identified by its pitch. Each pattern has five bars and spaces of equal pitch: 500, 200 and 100 nm. The central line area can be used for AFM measurements. The patterns are etched into silicon with a depth of approximately 45 to 50 nm. There is no coating on the silicon surface.

The specimen can be supplied unmounted or mounted on any of the standard range of SEM stubs. Please specify.

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PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.