Calibration Standards

This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.

This advanced CD calibration test specimen is suitable for calibrating smaller structures.

292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB.

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

The MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.

Films of tantalum pentoxide (approximately 100nm) are anodically grown on 0.5mm thick tantalum foil.