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agar manufactured

SEM 144nm reference standard, certified

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.
All prices exclude VAT.
Name & Code
Grouped product items
Code & Description Availability Price Qty
AGS1862
144nm certified calibration standard on 12.5mm pin stub
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862A
144nm certified calibration standard on 10mm JEOL stub
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862B
144nm certified calibration standard on 15mm Topcon/ISI/ABT stub
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862C
144nm certified calibration standard on 15mm Hitachi stub
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862D
144nm certified calibration standard on customer stub*
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862E
144nm certified calibration standard on 12.5mm JEOL stub
Average lead time: 44 days
Average lead time: 44 days
POA
POA
AGS1862S
144nm certified calibration standard on short pin stub
Average lead time: 27 days
Average lead time: 27 days
POA
POA
AGS1862U
144nm certified calibration standard, unmounted
Average lead time: 13 days
Average lead time: 13 days
POA
POA
Product Description

These 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.

There are two pitch sizes available:
The 144nm pitch, two dimensional array is accurate to ±1nm and is suitable for SEM and AFM calibrations. The pattern covers the entire chip enabling thousands of measurements to be made without revisiting the same scan area. The surface comprises aluminium ‘bumps’ on silicon. The bump height is approximately 90nm and width 75nm (not calibrated).

For SEM the 144nm standard works well at all accelerating voltages.

For AFM it can be used in contact, intermittent contact (TappingMode™) and other modes, with image sizes from 250nm to 10mm. For AFM the2-D standard is available unmounted or can be mounted on 12mm steel discs. The pattern is durable and allows for extended scanning in contact mode, which means that calibration and measurements are faster. 

Each standard is individually measured in comparison with a similar specimen calibrated at the German PTB (Physikalisch-Technische Bundesanstalt). The uncertainty of a single pitch is typically ±1.4nm.

Delivery & Returns
LEAD TIMES: Average Lead Times are shown individually in working days for any products not currently in stock. Whilst we regularly update this, actual Lead Times can vary due to supply chain fluctuations.