Calibration & test specimens

Agar Scientific specialises in producing a wide range of specimens specifically for SEM test and calibration where quantification or high resolution results are required.
SEM resolution is tested in terms of a combination of criteria, namely resolved gaps and the number of grey levels in the image. This is to ensure that the resolution has not been distorted by using the contrast to maximise visibility of edges. High resolution images ideally should show fine detail together with a lack of noise, evidenced by a good range of grey levels.
For assessments of resolution in scanning electron microscopes, we have developed a range of gold on carbon and tin on carbon test specimens. These specimens are suitable for tests of SE and BSE imaging and also for chemical mapping in high resolution systems such as in Auger scanning instruments. The specimens can be supplied on most types of specimen stub.

Gold on carbon AGS168 - resolution test specimen
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Resolution test specimen with a particle size range from approximately 5 - 150nm.
Gold on carbon AGS1969 - high resolution test specimen
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High resolution test specimen with a particle size range from approximately 3 - 50nm.
Gold on carbon AGS1987 - ultra high resolution test specimen
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Ultra high resolution test specimen with a particle size range from approximately <2 - 30nm.
Gold on carbon AGS168Z - low voltage resolution test specimen
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Low voltage resolution test specimen with a particle size range from approximately <30 - 300nm.
Tin on carbon AGS1967 - resolution test specimen
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Resolution test specimen with a particle size range from approximately 10 - 100nm.
Tin on carbon AGS1988 - low voltage resolution test specimen
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Low voltage resolution test specimen with a particle size range from approximately <20 - 400nm.
Tin on carbon AGS1937 - universal resolution specimen
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Universal resolution test specimen with a particle size range from approximately <5nm - 30um.
Calibration specimens on ultra thin substrates
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A range of gold on silicon and tin on silicon specimens specifically developed for use in conjunction with line width calibration wafers or other test systems where the height of a conventional specimen is a problem.
292nm reference standard
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292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB.
Electroformed mesh - Copper
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Electroformed mesh in Copper with an approximate thickness of 5 micron. Available 5, 20, 70, 80, 100, 200, 333, 400, 500, 750, 1000, 1500 and 2000 mesh sizes.
Electroformed mesh - Nickel
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Electroformed mesh in Nickel with an approximate thickness of 5 micron. Available 5, 20, 70, 80, 100, 200, 333, 400, 500, 750, 1000, 1500 and 2000 mesh sizes.
Electroformed mesh - Gold
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Electroformed mesh in Gold with an approximate thickness of 5 micron. Available 5, 20, 70, 80, 100, 200, 333, 400, 500, 750, 1000, 1500 and 2000 mesh sizes.