Bi-Directional Critical Dimension Standards, 2mm-100nm, ISO Certified
Bi-Directional Critical Dimension Standards, 2mm-100nm, ISO Certified
Economically priced yet fully-featured Bi-Directional Critical Dimension Standard with X and Y axis for calibration over a wide measurement range. 2.0mm to 100nm for a magnification range up to 10 - 200,000x.
All prices exclude VAT.
Description
Product Description
Economically priced, fully-featured compliant Critical Dimension Standards for calibration over a wide measurement range.
Available with two size ranges, which are both offered as traceable and certified standards:
2.0mm to 1μm for a magnification range from 10x - 20,000x and is ideal for desktop SEMs and low to medium magnification applications.
2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications.
Each die has a unique serial identification number and is NIST traceable (ISO 17025:2017 Sampling Scope of Accreditation):
Available with Global Certificate of Calibration using the average data measured for each production wafer
Also available with an Individual Die Certificate of Calibration for higher accuracy. Certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory
Manufactured on an ultra-flat silicon substrate with a precise 60nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm.
The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction, the CDMS standard can be cleaned using gentle plasma cleaning.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±20µm. There is no coating on the Si surface. Each CDMS calibration standard has a unique identification number.
LEAD TIMES: Average Lead Times are shown individually in days for any products not currently in stock. Whilst we are working closely with our suppliers to minimise the impact of global supply chain issues, and regularly update our product prices and lead times, some are subject to change due to supply chain fluctuations.
Delivery is calculated at the checkout, please see our delivery and returns page for more information.
PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.