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Geller Reference Standard MRS-3

The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation. Magnifications from 10X to 50,000X. 2µm minimum pitch. Traceable to national labs for ISO9000 and ISO17025.
All prices exclude VAT.
Name & Code
Grouped product items
Code & DescriptionAvailabilityPriceQty
AGS1990
MRS3 Geller Reference Standard Non Traceable
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POA
POA
AGS1990-S
MRS3 Geller Reference Standard Non Traceable in SEM Retainer
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POA
POA
AGS1990-T
MRS3 Geller Reference Standard Non Traceable in TEM 3mm x 0.25mm Retainer
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POA
POA
AGS1990-G
MRS3 Geller Reference Standard Non Traceable (1" x 3" Glass Slide Mounting)
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POA
POA
AGS1990-O
MRS3 Geller Reference Standard Non Traceable in Optical Retainer
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POA
POA
AGS1991
MRS3 Geller Reference Standard XY Traceable
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POA
POA
AGS1991-S
MRS3 Geller Reference Standard XY Traceable in SEM Retainer
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POA
POA
AGS1991-T
MRS3 Geller Reference Standard XY Traceable in TEM 3mm x 0.25mm Retainer
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POA
POA
AGS1991-G
MRS3 Geller Reference Standard XY Traceable (1" x 3" Glass Slide Mounting)
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POA
POA
AGS1991-O
MRS3 Geller Reference Standard XY Traceable in Optical Retainer
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POA
POA
AGS1992
MRS3 Geller Reference Standard XYZ Traceable
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POA
POA
AGS1992-S
MRS3 Geller Reference Standard XYZ Traceable in SEM Retainer
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POA
POA
AGS1992-T
MRS3 Geller Reference Standard XYZ Traceable in TEM 3mm x 0.25mm Retainer
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POA
POA
AGS1992-G
MRS3 Geller Reference Standard XYZ Traceable (1" x 3" Glass Slide Mounting)
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POA
POA
AGS1992-O
MRS3 Geller Reference Standard XYZ Traceable in Optical Retainer
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POA
POA
AGS1810P
MRS Pin ONLY for use with SEM Retainer (MRS3 & MRS4 Range)
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POA
POA
Product Description

The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation including scanning, optical reflection and transmission, scanning probe and confocal microscopy. The patterns are anti-reflective chromium on quartz, which have been fabricated using electron beam lithography techniques. This proprietary coating virtually eliminates electron beam charging at any accelerating voltage when used in an SEM.

The geometric design of the MRS-3 contains groups of nested squares spanning several orders of magnitude with pitches of 500, 50 and 2µm. The largest pattern is 8mm square, giving a magnification measurement range from x10 to x50,000. The patterns include nested squares and rectangles for X, Y calibration that range in size from 1 to 120µm, as well as circles ranging from 2 to 100µm in diameter, ideal for checking particle size counting systems. This standard can also be used for measurements in the Z plane where the pattern height is 0.1µm ± 0.003µm, and is most useful for profilometry.

The standard is available in three versions: non-certified; certified in X and Y– NPL and NIST traceable; and certified in X, Y and Z – the Z measurement traceable to NIST only. Although the specimens can be supplied unmounted, the use of a special protective holder is recommended. The universal holder enables the standard to be used for SEM and optical applications using reflected and transmitted illumination. Alternatively it can be supplied in a precision metal slide 25 x 43mm for optical use only.

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PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.