1. Primary Coating Heads
A process head must be equipped to the CCU-010 Base Module for operation. Heads are automatically detected by the system software.
Sputter Coating (SP-010 & SP-011)
Designed for high-quality metal deposition for SEM and EDX sample preparation.
- SP-010 Standard Head: Ideal for routine applications using noble metals (Au, Ag, Pt, Pd). Features a manual shutter.
- SP-011 High-Res Head: Includes an automatic shutter to protect the sample during pre-sputter cleaning. Recommended for the CCU-010 HV when using fine-grained materials like Chromium (Cr).
- Efficient Design: Utilises 54 mm diameter targets with high utilisation rates to reduce consumable costs.
Carbon Thread Evaporation (CT-010)
Engineered for analytical applications where metal coating is unsuitable, such as EDX/EDS, WDS, and TEM grid preparation.
- Patented Auto-Spooling: Features a unique automatic thread spooling system, allowing for multiple coating runs without opening the chamber or manual adjustment.
- Low Thermal Impact: "Flash evaporation" produces highly transparent, conductive carbon films while protecting heat-sensitive specimens.
2. Plasma & Etching Modules
Enhance your system with dedicated surface modification and cleaning capabilities.
ET-010 Etching Unit
An integrated plasma stage used for sample cleaning prior to coating or modifying surface properties after deposition.
- Function: Removes contaminants and increases thin-film adhesion by applying a negative high voltage directly to the sample plate.
- Design: Features an insulated 80mm diameter metallic plate with recesses for standard SEM pin stubs.
GD-010 Glow Discharge Attachment
A specialised internal upgrade for the CT-010 Carbon Head, primarily used for TEM grid preparation.
- Hydrophilisation: Renders carbon support films hydrophilic (wettable), ensuring uniform specimen distribution for aqueous suspensions.
- Sequential Workflow: Allows for carbon coating and glow discharge treatment in a single vacuum sequence.