SEM/EDX Test Specimen for Automated Particle Analysis
This is a highly developed sample for carrying out all necessary tests when using SEM/EDX systems in the field of automated particle analysis.
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This Synthetic Particle Specimen (SPS) has been specifically designed for the adjustment and validation of analytical SEM/EDX systems used for automated analysis of Gunshot Residue (GSR) samples.
Using a special patented process, particles containing the chemical elements lead, antimony and barium (Pb/Sb/Ba) are applied to the surface of an 8mm x 8mm glassy carbon chip. The different areas of the chip are required for different tests, evaluations and settings.
In addition to the structure of the particle size variation dot pattern matrix (see no. 5 below) provided by product: GSR and particle analysis calibration kit (Cat. No. AGS1823), other structures are present on the chip (see no. 1 – 4 below):
Test specimen for checking and validating automated particle analysis using SEM/EDX systems
- Cross line structures with 500µm long lines, subdivided with 50µm intermediate markers and number labels (arranged clockwise). Application: Length measurement in x and y orientation in the image / detection of scan direction errors of secondary scan generators /image to table alignment tests / settings for hysteresis correction.
- 0.8µm dot pattern (approx. 6000 dots, 20µm equidistant, area 2.4mm x 1.0mm) Application: Hysteresis tests for external particle analysis systems, image resolution test (freedom from distortion) at low microscope magnification but high pixel resolution.
- Grid pattern with triple lines of different grid widths. Application: Orthogonality test of the microscope image at different magnifications, various adjustments and settings are possible here.
- 7000µm line. Application: Long distance measurement for stage calibration tests and tests for mechanical stage defects
- Particle size variation dot pattern matrix.
Application: Determination of the detection sensitivity.
The structure has synthetic particles that are arranged in rows. Each row consists of 20 particles, which are spaced 150µm apart to form an equidistant matrix. The corresponding particle size is indicated at the beginning of each line, sizes:
2.0 / 1.8 / 1.6 / 1.5 / 1.4 / 1.3 / 1.2 / 1.1 / 1.0 / 0.9 / 0.8 / 0.7 / 0.6 / 0.5 / 0.4 µm diameter. Each particle consists of PbO, Sb2O3, BaF2.
The following requirements can also be checked more easily with this test specimen:
- Image calibration / stage calibration: Complete scanning of the sample (no untested gaps). Little or no field overlaps (multiple detections possible). No field rotations (image coordinate system well aligned with stage coordinate system)
- No flightback correction errors (particle is not found again at different scanning speeds)
- No mechanical backlash errors (absolute error of the stored stage coordinates)
- EDX / particle classification. Precise beam positioning during EDX measurement. Sufficient spectrum quality / Auto-ID function. Quality of the quantification result. Correct classification assignment
This test specimen is particularly useful for checking and adjusting various SEM/EDX combinations and SEM image acquisition systems such as:
Bruker Particle Analysis Software Esprit Feature or GSR Professional; Oxford AZtec / Inca Feature; EDAX Genesis, Aspex Perception; Thermo Fisher ParticleMetric or Perception; Jeol Particle Analysis; Hitachi 3D or 2D Particle Analysis; Thermo Fisher Maps™; Zeiss Microscopy Atlas™; and TESCAN Essence™ / TESCAN Image Snapper™