These new Critical Dimension Standards are economically priced, yet fully featured critical dimension standards for calibration over a wide measurement range. A combination of 60nm chrome for larger features and 20nm chrome with 50nm gold for high-resolution features provide increased contrast. Each die has a unique serial identification number and there are two options, teaceable and certified:
- A traceable CD standard uses average data measured for each production wafer
- Each certified CD standard is individually calibrated against a NIST measured standard
Critical Dimension Magnification Standard Specifications:
| Stated Line Pitch | Tolerances | Measured Average Values |
| 2mm | ±8μm | 2mm |
| 1mm | ±4μm | 1mm |
| 500μm | ±2μm | 500μm |
| 250μm | ±1μm | 250μm |
| 10μm | ±50nm | 10μm |
| 5μm | ±25nm | 5μm |
| 2μm | ±10nm | 2μm |
| 1μm | ±5nm | 1μm |
| 500nm | ±2.5nm | 501nm |
| 250nm | ±1.25nm | 250.9nm |
| 100nm | ±0.5nm | 100.4nm |
