These 200µm thick 3mm silicon support discs have a low stress, ultra-flat 50nm layer of silicon nitride on both sides. The film is non-stoichiometric and is closer to SiN than Si3N4. The discs are perfectly round and free of debris, with a specially designed edge for ease of handling.
The discs have a mean surface roughness of 0.45nm ±0.2 nm. They can be used for a number of applications, including as specimen discs for AFM and also as specimen mounts for SEM and FESEM. Silicon nitride coated discs are also available with a hydrophilic surface coating which consists of a 5nm atomic layer of hydroxylated aluminium deposited onto the membrane surface.
Supplied in packs of 10.