Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration.
Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions.
Pelcotec CDMS-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications.
Feature sizes for the Pelcotec CDMS-0.1T & 0.1C are: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 675µm ±25µm. There is no coating on the Si surface. Each Pelcotec CDMS calibration standard has a unique identification number.
They are available either unmounted or mounted on a choice of SEM holders - described under technical data. For AFM applications the Pelcotec CDMS is mounted on a 12mm AFM disc, for LM applications it is mounted on a 25 x 75mm glass slide.