Piezo‐Resistive Sensing Active (PRSA) probes are silicon cantilevers with an integrated piezo‐resistor and a thermal actuator for self‐sensing and self‐actuating scanning probe microscopy applications. The piezo‐resistors are integrated into a matched Wheatstone bridge to optimize the sensitivity and compensate environmental thermal drift. By using the selfsensing readout no laser adjustment is necessary in comparison to conventional optical readout AFM systems. This saves time during a cantilever change. Furthermore the new free space above the cantilever enables new applications and combination of AFM with various instruments. The cantilever chip is bonded onto a small printed circuit board (PCB) with a small connector for a quick cantilever change. The counter part PCB for the cantilever PCB can be connected to a low‐noise pre‐amplifier with a flat flex cable.
- Integration on a standard AFM scanner
- Force or deflection measurement within TEM, SEM, XPS, etc.
- Torque magnetometry
- Tip-scanning high-speed AFM
- Various cantilever based sensor applications (media properties, air pressure/acoustic wave, etc.)