A more advanced sputter coater where the complete sequence of flush, leak, coat and vent is automatically controlled. The solenoid operated leak valve allows the gas pressure to return automatically to pre-set conditions. The coater can also be operated in the manual mode if required. The sputter current is set by a digital programmer and is independent of the gas pressure. Sputtering currents up to 40mA allow a range of target materials to be efficiently sputtered by the magnetron head. Coating time can be set, stored and displayed by the digital timer.
Further automation can be achieved with the addition of the terminating film thickness monitor. With this fitted, the desired thickness can be entered and the sputtering process is automatically terminated when this thickness has been reached.
Chamber size AGB7341: 120 x 120mm.
Chamber size AGB7341SE:150 x 165mm.
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AGB7341 & AGB7341SE Agar Automatic Sputter Coater Technical Datasheet
Specification | |
Chamber size | AGB7341 120mm (4.75") dia x 120mm (4.75") high |
| AGB7341SE 150mm (5.9”) dia x 165mm (6.5") to 250mm (9.8") |
Sputter target | Gold target ø 57 x 0.1mm fitted as standard. |
| Optional targets: Au/Pd, Pt, Pt/Pd, Ag 57mm dia. x 0.1mm thick, or 57mm dia. x 0.2mm thick |
Sample table | Holds 12 SEM ½” (12.5 mm) stubs delivered as standard, height adjustment through 60mm. R-T stage available for AGB7341, R-T and R-P-T stage available for AGB7341SE |
Sputter supply | Programmable digital control, microprocessor-based |
| Safety interlocked |
| Current control independent of vacuum, 10 - 40mA |
Sputter head | Low voltage planar magnetron type with quick target change |
| Wrap-around dark-space shield |
Analogue metering | Vacuum: atmosphere - 0.001mb |
| Current: 0 - 50mA |
Control method | Automatic operation of gas purge and leak functions |
| Automatic process sequencing |
| Full manual override |
| Digital timer (0-300 sec) with pause |
| Automatic vent |
Dimensions | 420mm Wide x 295mm Deep x 287mm Height |
Weight | 11kg |
Power consumption | 45 VA max. (excluding rotary pump) |
Pumping System | |
Rotary pump | High speed, direct drive, 2 stage |
Pumping speed | 3.0/3.6m3/hr (50/60Hz) |
| Pump downtime to 0.1Mb is 20/25 sec |
Benchtop system | The vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system |
Dimensions | 330mm Wide x 215mm Deep x 210mm (270mm with filter) x Height 210mm |
Weight | 15kg |
Power consumption | 130 VA |
Services required | |
Supply | 100 – 120 or 200 – 240 VAC, 50/60Hz (specify on order) |
Power | 175VA max. |
Argon Gas | Purity min. 99.9% |
| Pressure: regulated 7 – 8 psi (0.5 – 0.6 bar) |
| Hose connection: 6.0mm (1/4”) |
Thickness Monitors (optional) | |
General specification | 4 digit display, push-button zero |
| 6MHz crystal with lifetime check |
| 10/sec update rate |
Thickness range | MINUS 99.9nm to 999.9nm |
Resolution | Better than 0.1nm |
Density range | 0.50-30.00gm/cm3 |
Tooling factor range: | 0.25-8.0 |
Crystal check | Lifetime display, 0.0 to 999.9kHz shift |
Parameter setting | Non-volatile parameter memory with automatic acceleration of scrolling rate |
Data change facility | 2 source memory (e.g. Au sputter and C evaporation) |
Supply | 100 - 120 or 200 - 240 VAC @ 4 VA, 50/60Hz |
Dimensions | Width 208mm (8.2"), Height 76mm (3.0"), Depth 160mm (6.3") |
Weight | 1.7kg (3.75 lbs) |
Terminate facility (only AGB7349) | Push button enable/disable |
Termination range (only AGB7349) | 0 - 999.9nm |
Termination output | SPCO relay contact, voltage free rated 0.5A @110 VAC, 1A @ 24VDC |