Self-Sensing Cantilever Probes

Silicon piezo-resistive self-sensing cantilever allow completely new applications in the fields of AFM, nanoprobing, torque-magnetometry and other sensing applications such as gas dynamics/media properties.

These cantilevers are equipped with a full piezo-resistive Wheatstone bridge that directly measures the cantilever signal electrically, which removes the space-consuming requirement for optical readout. This enables an easy and seamless integration with various instruments, eg SEM, TEM, many other measurement systems. The cantilever chip is bonded onto a small PCB with a small connector for a quick and highly reproducible cantilever exchange. The self-sensing cantilevers have a tip radius <15nm and are available with a variety of resonance frequencies and spring constants.