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Hardened DLC coated silicon probes

Long scanning hardened silicon probes.

The HARD series silicon etched probe tips have pyramidal shape. The probes are coated with a hard DLC film. The backside of the cantilevers is coated with the 30nm aluminium reflective film.

Key Features

  • Typical tip radius <20nm
  • Tipside coating - DLC 20nm
  • Backside coating - Al 30nm

 series  available coatings  length ±5µm  width ±3µm thickness ±0.5µm  resonance frequency kHz force   constant N/m
      typical range typical range
AGF1730 Hard Al BS 125 25 2.1 160 110-220 5.0 1.8-1.3
AGF1740 Hard Al BS 125 30 4.0 325 265-410 40 20-80
AGF1750 Hard Al BS 225 37.5 7.0 190 170-210 45 30-70
AGF1760 Hard Al BS 450 50 2.0 13 10-17 0.18 0.06-0.40
AGF1770 Hard Al BS 225 27.5 27.5 75 60-90 2.8 1.2-5.50
                 
AGF1780 / lever A Hard Al BS 110 35 2.0 205 130-290 8.9 2.7-24
AGF1780 / lever B Hard Al BS 90 35 2.0 300 185-430 16 4.8-44
AGF1780 / lever C Hard Al BS 130 35 2.0 150 95-205 5.4 1.7-14
                 
AGF1790 / lever A Hard Al BS 110 32.5 1.0 90 30-160 1.0 0.1-4.6
AGF1790 / lever B Hard Al BS 90 32.5 1.0 130 45-240 2 0.2-9
AGF1790 / lever C Hard Al BS 130 32.5 1.0 65 25-115 0.6 0.06-2.7
                 
AGF1720 / lever A Hard Al BS 500 30 2.7 15 12-18 0.2 0.1-0.4
AGF1720 / lever B Hard Al BS 210 30 2.7 80 60-100 2.7 1.1-5.6
AGF1720 / lever C Hard Al BS 150 30 2.7 155 115-200 7 3-16
AGF1720 / lever D Hard Al BS 100 50 2.7 350 250-465 42 17-90

Description Code Unit Qty
Hardened DLC silicon probe Al BS coated 125x25x2.1 um - Pack of 15 AGF1730-15 EA
Hardened DLC silicon probe Al BS coated 125x25x2.1 um - Pack of 50 AGF1730-50 EA
Hardened DLC silicon probe Al BS coated 125x30x4.0 um - Pack of 15 AGF1740-15 EA
Hardened DLC silicon probe Al BS coated 125x30x4.0 um - Pack of 50 AGF1740-50 EA
Hardened DLC silicon probe Al BS coated 225x37.5x7.0 um - Pack of 15 AGF1750-15 EA
Hardened DLC silicon probe Al BS coated 225x37.5x7.0 um - Pack of 50 AGF1750-50 EA
Hardened DLC silicon probe Al BS coated 450x50x2.0 um - Pack of 15 AGF1760-15 EA
Hardened DLC silicon probe Al BS coated 450x50x2.0 um - Pack of 50 AGF1760-50 EA
Hardened DLC silicon probe Al BS coated 225x27.5x27.5 um - Pack of 15 AGF1770-15 EA
Hardened DLC silicon probe Al BS coated 225x27.5x27.5 um - Pack of 50 AGF1770-50 EA
Hardened DLC silicon probe Al BS coated with 3 lever - Pack of 15 AGF1780-15 EA
Hardened DLC silicon probe Al BS coated with 3 lever - Pack of 50 AGF1780-50 EA
Hardened DLC silicon probe Al BS coated with 3 lever - Pack of 15 AGF1790-15 EA
Hardened DLC silicon probe Al BS coated with 3 lever - Pack of 50 AGF1790-50 EA
Hardened DLC silicon probe Al BS coated with 4 lever - Pack of 15 AGF1720-15 EA
Hardened DLC silicon probe Al BS coated with 4 lever - Pack of 50 AGF1720-50 EA

SEM image of the Hard tip

  • SEM image of the Hard tip