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Grating type TGX

The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm
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Name & Code
Grouped product items
Code & DescriptionAvailabilityPriceQty
AGF7026
Grating Type TGX01 3 Micron Pitch
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POA
POA
Product Description

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

Application

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

  • detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
  • determination of the tip aspect ratio

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

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PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.