Calibration grating sets TGS

Sets of calibration gratings and test structures are available to suit different requirements.

Description

Sets of calibration gratings and test structures are available to suit different requirements.

Set AGF7034 is for vertical calibration only, comprises; AGF7021 (TG201), AGF7022 (TG202) and AGF7023 (TG203).

Set AGF7036 is for tip characterisation and lateral calibration only, comprises; AGF7030 (PA01), AGF7026 (TGX01) and AGF7024 (TGG01).

Set AGF7035 is the most comprehensive set of gratings and test structures, combining AGF7034 and AGF7036 to allow lateral calibration, vertical calibration and tip characterisation.

Cat. no.	Grating type:
	PA01	TGX01	TGG01	TGZ01	TGZ02	TGZ03
AGF7034				F7021	F7022	F7023
AGF7035	F7030	F7026	F7024	F7021	F7022	F7023
AGF7036	F7030	F7026	F7024

Description	Code	Unit
Set for vertical calibration	AGF7034	EA
Set of gratings and test structures	AGF7035	EA
Set for tip characterisation	AGF7036	EA
Set for calibration set, traceable to NIST	AGF7034C	EA
Set for vertical calibration, traceable to NIST	AGF7035C	EA