Calibration grating sets TGS

Sets of calibration gratings and test structures are available to suit different requirements.

Set AGF7034 is for vertical calibration only, and the AGF7034C calibrated set is traceable to NIST. Both comprise; AGF7021 (TG201), AGF7022 (TG202) and AGF7023 (TG203).

Set AGF7036 is for tip characterisation and lateral calibration only, comprises; AGF7030 (PA01), AGF7026 (TGX01) and AGF7024 (TGG01).

Set AGF7035 is the most comprehensive set of gratings and test structures, combining AGF7034 and AGF7036 to allow lateral calibration, vertical calibration and tip characterisation.

Set AGF7035C makes the vertical calibration traceable to NIST.