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Calibration grating sets TGS

Sets of calibration gratings and test structures are available to suit different requirements.

Sets of calibration gratings and test structures are available to suit different requirements.

Set AGF7034 is for vertical calibration only, and the AGF7034C calibrated set is traceable to NIST. Both comprise; AGF7021 (TG201), AGF7022 (TG202) and AGF7023 (TG203).

Set AGF7036 is for tip characterisation and lateral calibration only, comprises; AGF7030 (PA01), AGF7026 (TGX01) and AGF7024 (TGG01).

Set AGF7035 is the most comprehensive set of gratings and test structures, combining AGF7034 and AGF7036 to allow lateral calibration, vertical calibration and tip characterisation.

Set AGF7035C makes the vertical calibration traceable to NIST.

 

Cat. no. Grating  type:      
  PA01 TGX01 TGG01 TGZ01 TGZ02 TGZ03
AGF7034       F7021 F7022 F7023
AGF7035 F7030 F7026 F7024 F7021 F7022 F7023
AGF7036 F7030 F7026 F7024      
AGF7034C       F7021 F7022 F7023
AGF7035C F7030 F7026 F7024 F7021 F7022 F7023

Description Code Unit Qty
Set for vertical calibration AGF7034 EA
Set of gratings and test structures AGF7035 EA
Set for tip characterisation AGF7036 EA
Set for calibration set, traceable to NIST AGF7034C EA
Set for vertical calibration, traceable to NIST AGF7035C EA

Calibration grating sets TGS

  • Calibration grating sets TGS