Calibration standards
11 Item(s)
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Nickel / chromium (Ni/Cr) ion sputter standard
More InformationThis standard consists of 12 alternating layers: six layers of chromium approximately 53nm thick, and six layers of nickel 64nm thick on a silicon wafer.Part no: AGS1807
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Tantalum pentoxide (Ta2O5) ion sputter standard
More InformationFilms of tantalum pentoxide (approximately 100 nm) are anodically grown on 0.5mm thick tantalum foil.Part no: AGS1806
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Silicon nitride (Si3N4) ion sputter standard
More Information100 nm silicon nitride (CVD) films deposited on a piece of silicon wafer, 1 x 3 cm.Part no: AGS1805
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Silicon dioxide (Sio2)
More InformationSilicon wafers (4") with thin films of silicon dioxide are available in thicknesses of 23, 50, 97 and 102.9 nm. -
MetroChip calibration standard
More InformationThe MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.Part no: AGS1949
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SEM 300nm reference standard
More InformationThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM. -
SEM 144nm reference standard, certified
More InformationThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM. -
SEM 144nm reference standard
More InformationThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM. -
292nm reference standard
More Information292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB. -
Critical dimension (CD) calibration test specimens - 500-200-100 nm structure
More InformationThis advanced CD calibration test specimen is suitable for calibrating smaller structures. -
Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure
More InformationThis CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.
11 Item(s)
FIB
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