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  1. Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5µm structure

    Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure

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    This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.
  2. Critical dimension (CD) calibration test specimens - 500-200-100 nm structure

    Critical dimension (CD) calibration test specimens - 500-200-100 nm structure

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    This advanced CD calibration test specimen is suitable for calibrating smaller structures.
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  1. Calibration standards (2)

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