Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure

This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch: 10, 5, 2, 1 and 0.5 µm. The central line area can be used for AFM measurements. The patterns are etched into silicon with a depth of approximately 200 µm. There is no coating on the silicon surface.

Each standard is identified by a unique serial number.

The specimen can be supplied unmounted or mounted on any of the standard range of SEM stubs. Please specify.