Designed by GETec Microscopy, AFSEM integrates into SEM or Dualbeam (SEM/FIB) microscopes and open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary capabilities of AFM and SEM enable unique characterisations of your samples.
AFSEM enables:
- True 3D-imaging of your sample
- Imaging large sample sizes
- Imaging with nanometer resolution
- Accurate 3D-metrology over long distances
- Nanoscale mechanical testing
AFSEM improves your workflow:
- Save time without necessary moving the sample between instruments
- Your sample is only exposed to the environment you choose
- Automatic identification of the sample region you want with both instruments
AFSEM benefits
AFSEM enables its features while maintaining full SEM functionality. Place the probe tip where you want it on your sample. AFSEM unique, compact design lets you use your standard SEM including sample stage and add-ons, such as energy-dispersive x-ray spectroscopy (EDX) or a micro-indenter, during AFM operation without any limitation. Removal is not needed – the AFSEM simply moves out of the way. For larger samples, the AFSEM can be removed in seconds. Self-sensing cantilevers open the space above the cantilever completely, use your existing accessories without limits. Self-sensing cantilevers simplify your setup, adjustment is automatic.
Example applications include:
- Investigation of the same sample region at the same time by SEM and AFM
- Wafer quality control
- In-situ AFM imaging on stressed devices under test
We will be pleased to discuss the demand of your application and analise the possibilities of the AFSEM integration into your existing equipment. We can offer a dedicated solution: hardware, software, installation, training, and after-sales support. This includes on-site and on-demand support, wide choice of cantilevers, spare parts and calibration service.
AFSEM uses self-sensing cantilevers from SCL-Sensor Tech.
Please do contact us for further information or to discuss specific requirements. With an AFSEM, the focus is your sample.
Video: Introduction
This video describes the design and working principles of the GETec AFSEM atomic force microscope for SEM.
Video: Integration in a SEM
This video describes the integration of the GETec AFSEM atomic force microscope in a SEM.
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