Grating type TGX

The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm

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Description
Technical Data

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

Application

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
determination of the tip aspect ratio

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Cat. no.	Grating	Step height	Pitch	Accuracy	Edge radii	Active area	Chip dims.
	type	µm*	µm	µm	mm	mm	mm
AGF7026	TGX01	1	3.0	0.1	<5	1 x 1	5 x 5 x 0.3

* The step height value is given for information only, not for vertical calibration purposes

Description	Code	Stock	Unit	Price	Qty
Grating Type TGX01 3 Micron Pitch	AGF7026	Lead time: 21 days	EA	£333.66