The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation including scanning, optical reflection and transmission, scanning probe and confocal microscopy. The patterns are anti-reflective chromium on quartz, which have been fabricated using electron beam lithography techniques. This proprietary coating virtually eliminates electron beam charging at any accelerating voltage when used in an SEM.
The geometric design of the MRS-3 contains groups of nested squares spanning several orders of magnitude with pitches of 500, 50 and 2µm. The largest pattern is 8mm square, giving a magnification measurement range from x10 to x50,000. The patterns include nested squares and rectangles for X, Y calibration that range in size from 1 to 120µm, as well as circles ranging from 2 to 100µm in diameter, ideal for checking particle size counting systems. This standard can also be used for measurements in the Z plane where the pattern height is 0.1µm ± 0.003µm, and is most useful for profilometry.
The standard is available in three versions: non-certified; certified in X and Y– NPL and NIST traceable; and certified in X, Y and Z – the Z measurement traceable to NIST only. Although the specimens can be supplied unmounted, the use of a special protective holder is recommended. The universal holder enables the standard to be used for SEM and optical applications using reflected and transmitted illumination. Alternatively it can be supplied in a precision metal slide 25 x43 mm for optical use only.
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