Calibration gratings

The calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form an angle of 54°74’.

Key Features

• Active area - 3 x 3mm
• Chip dimensions - 5 x 5 x 0.3mm
• Pitch - 10um
• Pitch accuracy - 0.1um
• Step height - 1.75um