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Calibration standards

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  1. 145nm AFM Reference Standard

    145nm AFM Reference Standard for AFM

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    The 145nm pitch is accurate to ±1nm.
  2. MetroChip calibration standard

    MetroChip calibration standard

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    The MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.

    Part no: AGS1949

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AFM & SPM

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