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Calibration standards

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  1. SEM image of a AGF1830 structure scan size 1um

    Sample for characterisation of tip shape

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  2. Typical STM image of HOPG with superimposed graphene structure

    HOPG

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  3. MetroChip calibration standard

    MetroChip calibration standard

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    The MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.

    Part no: AGS1949

  4. Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5µm structure

    Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure

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    This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.
  5. Critical dimension (CD) calibration test specimens - 500-200-100 nm structure

    Critical dimension (CD) calibration test specimens - 500-200-100 nm structure

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    This advanced CD calibration test specimen is suitable for calibrating smaller structures.
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AFM & SPM

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  1. Critical dimension (2)
  2. Geller reference standards (3)
  3. Reference standards (2)
  4. Resolution standards (1)
  5. Resolution standards - certified (2)

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