Calibration standards
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Critical dimension (CD) calibration test specimens - 500-200-100 nm structure
More InformationThis advanced CD calibration test specimen is suitable for calibrating smaller structures. -
Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure
More InformationThis CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch. -
MetroChip calibration standard
More InformationThe MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration.Part no: AGS1949
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Calibration gratings
More InformationThe calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate.
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Calibration grating sets TGS
More InformationSets of calibration gratings and test structures are available to suit different requirements. -
Grating type TGX
More InformationThe TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm -
Calibration gratings - TGXYZ series
More InformationCalibration gratings arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer.
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Gold calibration kit
More InformationGold colloids of known size provide a reliable means of characterising tip geometry and calibrating the Z-axis to piezoelectric response. -
Highly ordered pyrolytic graphite (HOPG)
More InformationHOPG is widely used as a substrate for specimens to be examined in scanning probe microscopy.
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2-D holographic array standards
More Information2-D holographic array standards for simultaneous calibration of X and Y axes.
AFM & SPM
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